中規模CVD装置によるHfC-(Hf・Ti) C-TiC三層膜の生成, 摩耗モード
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An optimun deposition condition of HfC- (Hf·Ti) C-TiC triple layered fillm on cemented carbide tools by medium size chemical vapor deposition (CVD) apparatus was obtained, and wear resistance and wear mode of the triple layered film were investigated. <BR>As a result, adhesive triple layered films were obtained by supplying source gases (I<SUB>2</SUB>, C<SUB>4</SUB>H<SUB>10</SUB>) under the following conditions; the source gas ratio of C<SUB>4</SUB>H<SUB>10</SUB>/I<SUB>2</SUB> was maintained at 1011, the same value obtained in the experimental CVD appartus, and the source flow rate was set at four times as large as that of the experimental CVD apparatus. <BR>Wear resistance of triple coated tools was found to be better than TiC coated tools. The role of each film was as follows; HfC film improved the crater wear, end flank wear and mean flank wear, and TiC film impeoved the lateral grooving flank wear. (Hf·Ti) C film was inserted to improved adherence between HfC and TiC.
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