高温雰囲気中における反応性スパッタリング

概要

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In the sublimated atmosphere of sulphur and selenium, nearly stoichiometric thin films of CdS, and CdSe are prepared by reactive sputtering method. Their properties depend remarkably on sputtering conditions, that is, sputtering rate, sublimation temperature and Ar gas pressure, etc. The values of dark resistivity and photosensitivity of the CdS films sputtered in sulphur vapour at 100°C are about 1010Ω-cm, and 5×103, respectively, and the dark resistivity 109Ω -cm and photosensitivity of 104 are obtained in the CdSe films deposited in selenium vapour at 125°C. This reactive sputtering method seems to be very suitable for preparing the stoichiometric thin films of binary compound semiconductor, one of whose constituent is very sublimating.
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