イオン衝撃加熱による蒸着装置の試作

概要

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The argon plasma, which contained highly concentrated argon ions, was produced by argon gas discharge of electrode-less of radio frequency. point end of rod type Ti target in argon plasma was bombarded with the argon ions by application of strong electrical field. Therefore, the temperature of the top of target was gradually raised.In the final state, the top of the Ti target was found to be melted and evaporated.<BR>An evaporation device was produced experimentally with the above-mentioned heating method. This device was tentatively used in order to make Ti thin films, which experiment turned out a success.<BR>The evaporated Ti particles were found to be ionized in passing through radio frequency electro-magnetic field. Then, the ionized Ti particles were easily centralized into ion beam state by making use of DC magnetic field.<BR>This device makes it possible to control the followings easily in wide range; an ionization rate of argon, an evaporation rate of Ti, and a degree of centralization of evaporated Ti particles respectively, because the mechanisms of the above-mentioned each systems in this device are those independent of one another.
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