ガス放出過程の考え方

概要

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Recently, some experimental results show that outgassing rate depends largely on the pumping speed of the system. For complete understanding of these facts, a simplified model was proposed. In the model, we consider only one kind of diffusion process from the inside of the bulk and one kind of adsorption and desorption processes with a sojourn time τ<SUB>1</SUB>. Practically, we can only measure net outgassing rate, i.e., the difference of coming out flux and incident one to the surface. When a surface is exposed to the absolute vacuum, the incident flux is zero and the outgassing rate is equal to the coming out flux which is much larger than the practical outgassing rate. The analysis shows that the outgassing rate depends not only on the pumping speed of the system but also on the surface conditions such as the surface density of adsorbed gas molecules and their sojourn time and approaches finally to a value which depends only on the material after a very long time.
日本真空協会の論文