アルミニウム超高真空系の金属ガスケットのシール機構と繰り返し使用が可能な金属ガスケットの開発

概要

論文の詳細を見る
Elastic metal gasket “Helicoflex” is a flexible metal O-ring composed of an elastic helical core and a metal sheet which wraps the elastic core. Practically, the sealing performance depends largely on the condition of work surfaces of the flange and the gasket. The relations between sealing characteristics and the condition of the work surfaces are described. Especially in the case of smooth mirror finished surface of the flange, the aluminum sheet contacted with flange surface is flowed in the gap between elastic core and flange surface as the flanges are tightened. The surface of the gasket in contact with flange surface is superfinished too with this flowing and the repeated use of the same metal gasket is possible.
日本真空協会の論文