スループット法によるガス放出率測定技術の検討

概要

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For the research of materials for use in a vacuum environment, the technology of outgassing measurement must be developed in order to obtain lower outgassing rates from the materials. We measured the outgassing rate of sample chambers and sample pieces using the throughput method. Then we studied the lowest limit on and problems involved in the measurement, and improved the measurement apparatus. The following results were obtained in this work : (1) The main factor leading to misunderstanding and determining the lowest limit was the outgassing from the Bayard-Alpert gauge. (2) In the outgassing rate measurment of the 11500 cm2 sample chamber, the order of 10-14 Torr·l/s·cm2 (at 20°C for nitrogen equivalent) was obtained using extractor gauges. (3) In the outgassing rate measurement of the 50 cm2 sample piece, the order of 10-12 Torr·l/s·cm2 (at 20°C for hydrogen equivalent) was obtained using a new quadrupole mass spectrometer for use in extremly-high vacuum. (4) It was possible to determine the outgassing rate of each gas component by measuring partial pressure.
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