チタンゲッタ材の高純度化処理による10-11Pa極高真空の発生

概要

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An extremely high vacuum of the order of 10-11Pa was achieved. The chamber was made of SUS304 stainless steel, electropolished and specially prebaked. After a bake out of 200°C, an outgassing rate of 2×10-11Pam3s-1m-2was obtained. The system was evacuated with a TMP. A Ti-15%Mo getter source was degassed for 70h at a temperature at which Ti evaporated at 1.3×10-7gs-1. At the same time, the system was baked at 250°C for 14.3h so that the titanium film temperature exceeded 320°C and the gases adsorbed on the film were well degassed. Then titanium was evaporated onto the water cooled shroud at a rate of 1.11.6×10-6 gs-1 for 68h. The pressure at room temperature under operation of the TMP reached at 3×10-10Pa. When the GV was closed and the shroud was filled with LN2, the pressure gauge indicated 7×10-11Pa.
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