6. 極高真空(<講座> プラズマ装置からの真空工学・排気技術V)

概要

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Development of vacuum technologies in the last ten years is overviewed for generation, measurement and applications of extremely high vacuums (XHV). The most important point is reduction of outgassing not only for vacuum chambers but also for pumps and measuring instruments. Outgassing rate with order of 10^<-11> to 10^<-12> Pa・m^3s^<-1>m^<-2> are achieved for stainless steels and aluminum alloys by careful surface treatments and appropriate bakings. In order to achieve ultimate pressures in an XHV region, several techniques such as high-temperature bakings and surface treatments are developed to reduce the outgassings from pumps. Reduction of soft X-ray effects and removal of electron stimulated desorption (ESD) ions make it possible to measure the pressure down to 10^<-12> Pa. These improvements provide us with pressure with order from 10^<-10> to 10^<-11> Pa, for the developments of new functional materials, highly sensitive analysing techniques and so on.
社団法人プラズマ・核融合学会の論文
1995-11-25