アルミ磁気ディスク基板ポリシング用ポリシャの開発（第1報） : —ポリシング特性に及ぼすポリシャ製造におけるバフ方法の影響—

概要

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The polisher has large influence on the polishing characteristics of the aluminum type of magnetic disk substrate. The optimum polisher manufacturing technique acts on the important role to the products of the magnetic disk substrate. In the report, from the point of view, the influence of the buffing process in polisher manufacturing on polishing characteristics of the aluminum magnetic disk substrate in the rough finishing process is examined. The suede type of polisher is manufactured by changing the mesh size of sand paper used in buffing process and changing the buffing removal amount. The polisher surface roughness becomes larger for coarser sand paper. The polished substrate surface roughness becomes rougher for rougher polisher surface. The open pore size on the polisher surface becomes larger as the buffing removal amount increases. The substrate removal rate and the decreasing rate edge of roll-up type of roll-off height become smaller for the polisher of larger open pore size, respectively.