Precision Position Control of Pneumatic Servo Table Embedded with Aerostatic Bearing

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概要

• 論文の詳細を見る

• This paper treats the control of a pneumatic servo table combining the air cylinders and sliding guides embedded with aerostatic bearing. Since compressed air flows into the small gap between the bearing and the sliding guide, the cylinder floats around the air film and on the guide surface of the table. The friction forces of the pneumatic servo table are measured, and the relation of frictional force and speed is plotted. The hybrid self-tuning fuzzy controller with the velocity compensators and dead-zone are proposed in this paper. From the experimental results, in case of different position, the positioning accuracy can reach the 0.04μm.

• 一般社団法人 日本機械学会の論文

著者

• Shih Ming-chang

  Department Of Mechanical And Automation Engineering Da-yeh University

• TSAI Ming-Hung

  Department of Dentistry, En Chu Kong Hospital

• Pai Kei-ren

  Department Of Mechanical Engineering National Cheng Kung University

• HSU Tzu-Yung

  Department of Mechanical Engineering, National Cheng-Kung University

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• Pneumatic Servo-Cylinder Position Control by PID-Self-Tuning Controller
• Effect of Pulse-Reverse Current on Microstructure and Properties of Electroformed Nickel–Iron Mold Insert
• Precision Position Control of Pneumatic Servo Table Embedded with Aerostatic Bearing

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