イットリウム系超伝導薄膜のバイアス電圧効果

概要

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Superconducting thin films of Y-Ba-Cu-O on MgO(100) were fabricated using the process of RF sputterring technique under bias voltage, and it's characteristics were measured and evaluated. The target used here was Y-Ba-Cu-O pellets. This experiment put the substrate at off-centerd position for the target. The substrate electrode was biased to protect the films from the bombardment of the charged particles. Within 10s after deposition, pure oxygen was introduced into the sputterring chamber at about 105Pa, and the substrate was quickly cooled down to room temperature within a few minutes. Thus, no special annealing was performed after film growth. The films have a Tc of about 40K using the cryostats with the mechanical compressor.
津山工業高等専門学校の論文
1992-10-30