MP-13 FIB/EBデュアルビームリソグラフィーによるカーボンナノ機械振動子の作製(ポスターセッション)

概要

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A thinned resonant mechanical structure with a large surface area is a useful nanostructure for an extremely sensitive sensing device that can detect small physical quantities using changes in vibrational properties. Therefore, an ultra-thin carbon nanomechanical resonator fabrication from poly (methyl methacrylate) (PMMA) using focused-ion-beam (FIB) and electron-beam (EB) dual-beam lithography was examined. In this study, the suspended PMMA structure was fabricated by FIB/EB dual-beam lithography, and a suspended PMMA structure was cured by an ion-beam (IB) modification technique using a 30kV Ga^+ FIB. As a result, we found by Raman spectroscopy that the PMMA was carbonized to the diamond-like carbon by IB modification. And also, Young's modulus of cured PMMA was approximately 143.3GPa. In addition, we evaluated the vibrational properties of the cured PMMA nanowire, and confirmed that it had a useful property as a resonant structure.
一般社団法人日本機械学会の論文
2011-09-25