M1-10 FIB-CVDを用いたナノ機械デバイス作製における動特性解析法(M1 製作技術,材料)

概要

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Small size structures of diamond-like carbon (DLC) deposited by FIB-CVD contain microscopic non-uniformity in its mechanical properties. This is mainly due to containing Ga implanted by Ga ion irradiation during deposition [1]. In studying applications of DLC nanostructures to mechanical devices, the non-uniform properties cause difficulties in designing nanomechanical devices. In order to establish a modeling method for nanomechanical device design, precise mechanical property evaluation was studied. For the property characterization, several techniques such as transmission electron microscope (TEM), ion implantation simulation and density measurement by vibration were carried out. Then, an analysis model for Finite Element Method (FEM)-based dynamic characteristic designing was built up.
一般社団法人日本機械学会の論文
2009-10-15