E36 リニアモータ駆動・水静圧案内テーブルの開発 : 配管中の混入空気がテーブルのピッチングモーションに及ぼす影響(OS2 最新機械要素技術(3))

概要

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A linear-motor-driven table supported by hydrostatic-water bearings had been developed. The table slider is supported by a single-sided recess type bearing and preloaded by attractive force of a linear-motor magnet. Since eccentric excitation force is applied to the table slider due to the change of attractive force according to the magnet track position of the linear-motor, pitching motion of the table occurs. This paper investigates the effect of air volume contained in a water-supply tube on the pitching motion. Larger air volume results in lower natural pitching frequency of the table slider and larger pitching angle. When the natural pitching frequency corresponds to the frequency of the eccentric excitation force during table feed, pitching angle grows by resonation.
2010-11-19