B36 精密平面研削盤用水静圧案内テーブルの開発 : テーブルの静的特性(OS-2 最新機械要素技術(2))

概要

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A linear-motor-driven table system equipped with hydrostatic water bearings is developed. The table system is equipped with one-side-recess-type bearings and the slide table is preloaded by an atiractive force of linear-motor magnet The sustaining force and static stifihess of the table is affected by flow rate of water and load on the table. The fundamental performance of the system is experimentally investigated and the detected data are compared with theoretical values. As the result, the measured sustaining force and static stilThess is smaller than theoretical values. The reason of this is the leakage of water from the bearing surfaces. In consideration of the additional clearance due to the leakage, the measured values approximately correspond to the theoretical ones.
社団法人日本機械学会の論文
2008-11-21