リニアモータ駆動・水静圧案内テーブルの開発 : テーブルシステムの設計・開発と静的特性(機械要素,潤滑,工作,生産管理など)

概要

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A linear-motor-driven table sustained by constant-flow hydrostatic water bearings which are free from environmental pollution is developed. The static characteristic of the developed table system is experimentally investigated. Since the constant-flow hydrostatic bearings needs no restrictor, such as orifice or capillary tube, blocking of the restrictor by bacteria, sludge, and rust of steel can be avoided. A miniature gear pump applied showed good constant flow performance for the hydrostatic bearing without pump pulsation. A simple one-side-recess type bearing is chosen for the system. In order to obtain high sustaining stiffness, preload is given to the bearings using attractive force of a core-type linear motor. The preload is effective in both vertical and horizontal directions by using the slant arrangement of the linear-motor magnet. The measured sustaining force is 4.5kN and static stiffness is 0.66kN/μm under bearing clearance h=16μm and flow rate Q=0.92mL/s.
社団法人日本機械学会の論文
2009-04-25