512 リニアモータ駆動水静圧テーブルの開発 : 基本設計と静剛性(OS-4 機械要素技術)

概要

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High precision, low production-cost, and environment-friendly table systems are required from machine tool builders. A linear-motor-driven table with hydrostatic water bearings is newly developed and its performance is investigated. The table supported by constant-flow water bearings is preloaded by magnetic force of the linear motor. A magnet plate of the linear motor is mounted on an inclined base of the table system so as to preload the table in horizontal and vertical directions. Static stiffness of the table system is affected by bearing clearance and water-flow volume. Load carrying capacity and static stiffness of the developed table under 6μm bearing clearance were estimated at 17.6kN and 1.95kN/μm respectively.
社団法人日本機械学会の論文
2006-11-24