A25 Analysis on Mechanical Removal Processing Mechanism of Nano-sheet by AFM Probe : Effect of Probe Material on Mechanical Removal Processing Mechanism(M4 processes and micro-manufacturing for science)
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概要
- 論文の詳細を見る
We examined nano mechanical removal processing of potassium niobate nano-sheet with Atomic Force Microscope (AFM). In particular, this paper analytically makes clear an effect of AFM probe material on processing mechanism compared of processing with diamond coating silicon and silicon probe. As a result, the processing with silicon probe proved to need the large force of indention and unbinding water adhesion compared to that with diamond coating silicon probe. Consequently, the machinability with silicon probe is worse than that with diamond coating silicon probe.
- 一般社団法人日本機械学会の論文
- 2009-12-01
著者
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Demura Kazuya
Department Of Precision Mechanics Chuo University
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Watanabe Naoki
Department Of Precision Mechanics Chuo University
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Watanabe Naoki
Department Of Applied Physics Faculty Of Engineering Tohoku University
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Ohki Yuta
Department Of Precision Mechanics Chuo University
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IHARA Tohru
Department of Precision Mechanics, Chuo University
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Ihara Tohru
Department Of Precision Mechanics Chuo University
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