A24 Precision in Mechanical Removal Processing of Nano-sheet by AFM Probe : Study of Processing Method for Fabrication of High Precision Groove(M4 processes and micro-manufacturing for science)
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概要
- 論文の詳細を見る
This paper presents nano mechanical removal processing of potassium niobate nano-sheet with Atomic Force Microscope (AFM). In particular, we examined the method of the processing control for the direction of nano-sheet surface so as to attain a high precision machining of bylayer nano-sheet. As a result, by machining direction taking account of machining anisotropy, and machining load W balanced machining accuracy and machining stability, the machined groove with 28 nm maximum width and very sharp edge of bylayer nano-sheet was attained.
- 一般社団法人日本機械学会の論文
- 2009-12-01
著者
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Demura Kazuya
Department Of Precision Mechanics Chuo University
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Watanabe Naoki
Department Of Precision Mechanics Chuo University
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Watanabe Naoki
Department Of Applied Physics Faculty Of Engineering Tohoku University
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Ohki Yuta
Department Of Precision Mechanics Chuo University
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IHARA Tohru
Department of Precision Mechanics, Chuo University
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Ihara Tohru
Department Of Precision Mechanics Chuo University
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