T0401-2-1 マイクロ波原子間力顕微鏡プローブの開発および電気的特性の評価(金属ナノ材料の創製と展開(2))

概要

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In order to evaluate electrical properties in nanoscale, the new microwave atomic force microscope (M-AFM) probe was studied and the characteristics of the M-AFM probe were evaluated in order to understand the performance of the probe for the topography of materials and the sensitivity for detection of microwave signals. AFM topography of a grating sample was measured by using the fabricated probe. It was found that the fabricated probes have nanometer order resolution. In addition, the amplitude of the reflection coefficient of microwave was measured by approaching an Au-GaAs sample, which has different conductivity, respectively. As a result, the change of the microwave signals between Au and GaAs were observed. These results indicate that the fabricated M-AFM probe has the capacity of measuring the electrical properties of materials in nanoscale.
一般社団法人日本機械学会の論文
2009-09-12