G0601-5-3 高周波液中プラズマの放電特性(熱工学(5)プラズマ・熱現象)

概要

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In-liquid plasma has been expected as an advanced technology of generating plasma in a liquid by a high frequency(HF) or a microwave(MW) irradiation. In this study, 27.12MHz HF plasma is generated in pure water as well as in air. The phase difference of voltage and current waveforms before and after plasma ignition, and the self-bias voltage are investigated by using an oscilloscope. The electrical property of plasma as an equivalent circuit can be explained from the difference of the phase difference qualitatively. The self-bias voltage became positive with pressure increase when the electrode made of a tungsten rod is used. As pressure increases, the electron supply into the plasma changes from a secondary electron discharge to thermionic emission.
社団法人日本機械学会の論文
2009-09-12