液中プラズマの気泡の挙動と周辺温度

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“In-liquid plasma” is generated inside the bubbles on the tip of an electrode by applying microwave radiation from the electrode. The in-liquid plasma on the tip of an electrode consists of a plasma generation region, vapor phase, bubble interface, and liquid phase. The growth of the bubble, including the plasma, in n-dodecane was observed using a high-speed camera. This was done because the pressure and the temperature surrounding the plasma needed to be clarified for utilizing it in such processes as chemical vapor deposition. The dependence of the bubble growth on the vessel pressure and on the microwave power was clarified, and the internal pressure of the bubbles was calculated by substituting the approximation curve of the observed bubble diameter in the Rayleigh-Plesset equation. The bubbles grow not continuously but intermittently as the plasma region expands and contracts. The growth of the bubbles increases with increase in the microwave power or decrease in the vessel pressure. The value of the internal pressure of the bubbles peaks between 200 and 600 hPa, it increases as the microwave power increases, and the effect of the vessel pressure on it is small. In addition, we measured the temperature surrounding the plasma using a thermocouple. The temperature can be measured vertically from the vapor phase to the liquid phase by moving the thermocouple in that direction. The point where the temperature measurable by the thermocouple reaches a maximum moves away from the tip of the electrode as the microwave power increases. The maximum temperature reaches the approximate saturation temperature of the liquid.
社団法人日本伝熱学会の論文
2008-10-01

液中プラズマの気泡の挙動と周辺温度

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