2105 光熱効果を用いた光マイクロアクチュエータ(要旨講演,一般セッション:マイクロナノメカトロニクス)

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This paper describes a development of an optical micro-actuator that uses the photothermal effect. Photothermal effect has advantages, such as high-speed responce by the miniaturization, the noncontact energy supply and control, and material independenc method. Actuator can be expected the increase of displacement by employing the bimorph structure, and can gain maximize driving force by small optical power. Combination of the stainless steel and the photoresist, whose difference in the coefficient of linear expansion is large, is selected as a bimorph structure. An arch type inch worm made of the stainless steel and the photoresist is produced with the simple micromachining. For the driving of the arch type inch worm, speed of 0.2mm/sec is obtained by the laser irradiation frequency of 2Hz, and the speed of 0.1 mm/sec is obtained by 1Hz in the acrylic resin pipe.
2008-03-17