2019 ナノインデンテーションにおける単結晶シリコンの相変態が及ぼす硬さへの影響(S16-2 物理的・力学的現象,S16 インデンテーションの物理と応用)

概要

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Influence of phase transformation on mechanical properties of single crystal silicon at <100> crystal orientation is investigated. Nanoindentaion is examined with unloaing time of 10s, 15s and 20s, and the crystaline structures of impressions are identified by Raman spectroscopic analysis. In 70〜90mN load with unloading time of 15s, the same coexistence of Si-3 and Si-12 crystaline structure cause the variation in the elastic modulus of 5GPa. The coexistence of the crystaline structures of Si-3, Si-12 and a-Si cause the variation in hardness of 1.5GPa with 50mN and the increase in the hardness of 2GPa in 60mN on unloding time of 15s.
一般社団法人日本機械学会の論文
2007-09-07