光熱効果によるマイクロディスクの駆動(第1報) : マイクロディスクへの定在波発生および進行波の励起

概要

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Photothermal-effect is the method to get driving force due to the thermal stress by temperature gradient that changes light to heat. Micro-cantilever is the simplest elements of micromachine that is driven by using modulated laser diode (output 10mw). Frequency response characteristics and deflection of a micro-cantilever are measured. Applying the principle of photothermal driving of the micro-cantilever, standing wave is excited on the micro-disk. Frequency response characteristics, modal analysis and amplitude of the micro-disk are measured. The micro-disk is made of copper which diameter is 10mm and thickness is 80μm. Standing wave of mode shape No. 2 and mode shape No. 3 is excited on the micro-disk. Traveling wave is excited on the micro-disk by using plural lasers. Traveling wave is excited on a micro-disk by using two modulated laser diodes. Amplitude of traveling wave and phase difference are measured. The traveling wave of mode shape No.3 is generated on the micro-disk and maximum amplitude is 0.26μm.
社団法人精密工学会の論文
2007-02-05