1448 ナノインデンテーション挙動のFEMシミュレーションによる基板上薄膜の力学特性評価(S07-2 セラミックスおよびセラミックス系複合材料II,21世紀地球環境革命の機械工学:人・マイクロナノ・エネルギー・環境)

概要

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Using Finite Element Method (FEM), elastic indentation behavior with a point-sharp indenter on film/substrate systems is analyzed numerically. Non quadratic relationship between indentation load P and penetration depth h observed in an indentation on the film/substrate systems is well described with an empirical equation ,in which surface deformation such as pile-up and sink-in is taken into account, developed in this study. Using the empirical equations, the elastic modulus of film can be quantified with iterative calculation when the elastic modulus of substrate and the thickness of film are given apriori.
2008-08-02