圧電セラミックスの結晶方位ならびに分域・分域反転のEBSP観察(<小特集>結晶回折法および電子線後方散乱法による材料評価)

概要

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Piezoelectric ceramics are widely applied to the components of electric devices and actuators. Therefore, the reliabilities of PZT are very important. In this study, the domains in a crystal of PZT were observed by the EBSP method. However, it was very difficult to observe the crystal orientations and domains by EBSP method, because PZT ceramics were non-conducting materials and solid solutions. But, by using the acid chemical etching in combination with mechanical polishing for specimen surface finishing, the laminar domain structures on a nanoscale, were able to be observed by EBSP method. In addition, observation of domain switching behavior by Vicker's indentation test was conducted. The specimen was poled in the across-the-width direction (PS specimens) parallel to the crack front line. After the indentation tests, the mechanical loading-induced domains switching, 90° domain switching, were observed by EBSP method. Especially, the domain switching was most obvious in the intensity change of the (001) pole figure. The c-direction before loading was changed into two mutually-perpendicular directions by the mechanical loading.
社団法人日本機械学会の論文
2008-03-25