Toward Standard Method for Microelectromechanical Systems Material Measurement through On-Chip Electrostatic Probing of Micrometer Size Polysilicon Tensile Specimens : Surfaces, Interfaces, and Films
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 2001-02-01
著者
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Moal Patrice
Laboratoire De Mecanique Appliquee R. Chaleat(lmarc):institut Des Microtechniques De Franche-comte
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Le Moai
Institut Des Microtechniques De Franche Comte Laboratoire De Mecanique Appliquee Universite De Franc
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Minotti P
Univ. Franche Comte Besancon Fra
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Joseph Eric
Laboratoire De Mecanique Appliquee R. Chaleat(lmarc):institut Des Microtechniques De Franche-comte
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Bourbon G
Univ. Franche Comte Besancon Fra
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Bourbon Gilles
Laboratoire De Mecanique Appliquee R. Chaleat(lmarc):institut Des Microtechniques De Franche-comte
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LE MOAL
Institut des Microtechniques de Franche Comte, Laboratoire de Mecanique Appliquee, Universite de Fra
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MINOTTI Patrice
Institut des Microtechniques de Franche Comte, Laboratoire de Mecanique Appliquee, Universite de Fra
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JOSEPH Eric
Institut des Microtechniques de Franche Comte, Laboratoire de Mecanique Appliquee, Universite de Fra
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BOURBON Gilles
Institut des Microtechniques de Franche Comte, Laboratoire de Mecanique Appliquee, Universite de Fra
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Le Moal
Institut des Microtechniques de Franche Comte, Laboratoire de Mecanique Appliquee
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- Toward Standard Method for Microelectromechanical Systems Material Measurement through On-Chip Electrostatic Probing of Micrometer Size Polysilicon Tensile Specimens : Surfaces, Interfaces, and Films