MMT-05 SILICON-BASED FLAPPING WINGS USING SELF-ACTUATED STRESS DISTRIBUTION

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概要

• 論文の詳細を見る

• The objective of this project is to develop a battery - powered ornithopter Micro Air Vehicle (MAV) using MEMS technology. The major goal of the MAV project focuses on flapping wing propulsion systems. This paper summarizes the bottom-up design approach involved in new IC-processed micrometer thick silicon wings. The proposed MEMS - based wings have been designed so as to allow two degrees of freedom : flapping and feathering. The wings are actuated through nearly 20,000 elementary actuation cells that are distributed over the upper surface of single crystal silicon structures.

著者

• MOAL Patrice

  Laboratoire de Mecanique Appliquee R. Chaleat(LMARC)

• BOURBON Gilles

  Laboratoire de Mecanique Appliquee R. Chaleat(LMARC)

• JOSEPH Eric

  Laboratoire de Mecanique Appliquee R. Chaleat(LMARC)

• HIBERT Cyrille

  EPFL Center of Micro-Nano Technology (CMI)

• MINOTTI Patrice

  Laboratoire de Mecanique Appliquee R. Chaleat(LMARC)

• Moal Patrice

  Laboratoire De Mecanique Appliquee R. Chaleat(lmarc):institut Des Microtechniques De Franche-comte

• Le Moai

  Institut Des Microtechniques De Franche Comte Laboratoire De Mecanique Appliquee Universite De Franc

• Minotti P

  Univ. Franche Comte Besancon Fra

• Minotti Patrice

  Laboratoire De Mecanique Appliquee R. Chaleat (lmarc)

• Joseph Eric

  Laboratoire De Mecanique Appliquee R. Chaleat(lmarc):institut Des Microtechniques De Franche-comte

• Bourbon G

  Univ. Franche Comte Besancon Fra

• Bourbon Gilles

  Laboratoire De Mecanique Appliquee R. Chaleat(lmarc):institut Des Microtechniques De Franche-comte

関連論文

• MMT-05 SILICON-BASED FLAPPING WINGS USING SELF-ACTUATED STRESS DISTRIBUTION
• (マイクロマシン)
• Toward New Cylindrical Electrostatic Micromotors Using Tubular Combination of Arrayed Direct-Drive Actuators
• Design and Characterization of High-Torque/Low-Speed Silicon Based Electrostatic Micromotors Using Stator/Rotor Contact Interactions
• Investigation of Output Mechanical Power Limits on High-Torque Electrostatic Actuators Using High-Frequency Complementary Metal Oxide Semiconductor (CMOS) Camera Combined With Image Processing Software : Semiconductors
• On-Chip Investigation of Torque/Speed Characteristics on New High-Torque Micrometer-Size Polysilicon Electrostatic Actuators : Semiconductors
• Toward Standard Method for Microelectromechanical Systems Material Measurement through On-Chip Electrostatic Probing of Micrometer Size Polysilicon Tensile Specimens : Surfaces, Interfaces, and Films
• PWK RECENT TRENDS IN THE DESIGN OF IC-PROCESSED ACTUATORS AND DISTRIBUTED SYSTEMS

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