On-Chip Investigation of Torque/Speed Characteristics on New High-Torque Micrometer-Size Polysilicon Electrostatic Actuators : Semiconductors
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 2001-06-15
著者
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Moal Patrice
Laboratoire De Mecanique Appliquee R. Chaleat(lmarc):institut Des Microtechniques De Franche-comte
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Le Moai
Institut Des Microtechniques De Franche Comte Laboratoire De Mecanique Appliquee Universite De Franc
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Minotti P
Univ. Franche Comte Besancon Fra
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Joseph Eric
Laboratoire De Mecanique Appliquee R. Chaleat(lmarc):institut Des Microtechniques De Franche-comte
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Bourbon G
Univ. Franche Comte Besancon Fra
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Bourbon Gilles
Laboratoire De Mecanique Appliquee R. Chaleat(lmarc):institut Des Microtechniques De Franche-comte
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MINOTTI Patrice
Institut des Microtechniques de Franche Comte, Laboratoire de Mecanique Appliquee, Universite de Fra
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JOSEPH Eric
Institut des Microtechniques de Franche Comte, Laboratoire de Mecanique Appliquee, Universite de Fra
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BOURBON Gilles
Institut des Microtechniques de Franche Comte, Laboratoire de Mecanique Appliquee, Universite de Fra
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MOAL Patrice
Institut des Microtechniques de Franche Comte, Laboratoire de Mecanique Applique, Universiti de Fran
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- Investigation of Output Mechanical Power Limits on High-Torque Electrostatic Actuators Using High-Frequency Complementary Metal Oxide Semiconductor (CMOS) Camera Combined With Image Processing Software : Semiconductors
- On-Chip Investigation of Torque/Speed Characteristics on New High-Torque Micrometer-Size Polysilicon Electrostatic Actuators : Semiconductors
- Toward Standard Method for Microelectromechanical Systems Material Measurement through On-Chip Electrostatic Probing of Micrometer Size Polysilicon Tensile Specimens : Surfaces, Interfaces, and Films