Design and Characterization of High-Torque/Low-Speed Silicon Based Electrostatic Micromotors Using Stator/Rotor Contact Interactions
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1998-03-15
著者
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Moal Patrice
Laboratoire De Mecanique Appliquee R. Chaleat(lmarc):institut Des Microtechniques De Franche-comte
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Le Moai
Institut Des Microtechniques De Franche Comte Laboratoire De Mecanique Appliquee Universite De Franc
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Minotti P
Univ. Franche Comte Besancon Fra
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Minotti Patrice
Limms
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Bourbon G
Univ. Franche Comte Besancon Fra
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Langlet Philippe
3rd Department,Institute of Industrial Science, University of Tokyo
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MASUZAWA Takahisa
CNRS-IIS, Institute of Inclustrial Science, University of Tokyo
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LANGLET Philippe
CNRS-IIS, Institute of Industrial Science, University of Tokyo
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BOURBON Gilles
LIMMS
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Langlet Philippe
3rd Department Institute Of Industrial Science University Of Tokyo
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Masuzawa Takahisa
2nd Department Institute Of Industrial Science University Of Tokyo
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- Design and Characterization of High-Torque/Low-Speed Silicon Based Electrostatic Micromotors Using Stator/Rotor Contact Interactions
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