PWK RECENT TRENDS IN THE DESIGN OF IC-PROCESSED ACTUATORS AND DISTRIBUTED SYSTEMS

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概要

• 論文の詳細を見る

• This paper surveys recent advances in the field of IC-processed actuators and distributed microelectromechanical systems (MEMS). IC-processed actuators are expected to open a wide range of industrial applications on the near term. The most promising investigations deal with high-aspect ratio electrostatic microactuators suitable for use in numerous technical fields such as super-compact computer peripheral devices and integrated watch mechanisms. Because the silicon micromachining technology have the potential to integrate both mechanical components and control circuits, MEMS-based active control of microscopic and macroscopic structures appears to be one of the most promising challenges for the next decade. As a first step towards new generations of MEMS-based smart structures, recent investigations dealing with IC-processed distributed systems are briefly introduced in the second part of the paper.

• 一般社団法人日本機械学会の論文

著者

• MINOTTI Patrice

  Laboratoire de Mecanique Appliquee R. Chaleat(LMARC)

• Minotti Patrice

  Laboratoire De Mecanique Appliquee R. Chaleat (lmarc)

関連論文

• MMT-05 SILICON-BASED FLAPPING WINGS USING SELF-ACTUATED STRESS DISTRIBUTION
• PWK RECENT TRENDS IN THE DESIGN OF IC-PROCESSED ACTUATORS AND DISTRIBUTED SYSTEMS

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