Insulated Probe Method Using Transmission Line for Monitoring RF Plasmas
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概要
- 論文の詳細を見る
A new driving system of an insulated probe is proposed and compared in Ar RF plasma with the conventional insulated probe system using an operational amplifier for probe current detection. In this system, the probe is driven by a low-output-impedance driver through a transmission line as long as a half-wavelength of the fundamental component of the RF, and the probe current is detected at the midpoint of this transmission line as a voltage signal. It was shown that measurement almost equivalent to that using an operational amplifier is possible with the use of a transmission line. The advantage of this system is that the flexibility of geometric design of the probe system is greatly improved without the parasitic effect due to the increase of stray capacitance.
- 社団法人応用物理学会の論文
- 2002-08-15
著者
-
ITATANI Ryohei
Niihama National College of Technology
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DEGUCHI Mikio
Niihama National College of Technology
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Deguchi M
Niihama National Coll. Technol. Ehime Jpn
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