Insulated Modulation Probe Method for Monitoring RF Plasmas
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概要
- 論文の詳細を見る
In the measurement of HF plasma by the insulated pulse probe method, by applying a sinusoidal voltage (ungular frequency p) to the probe instead of the pulse voltage, the RE component (angular frequency ω) in the probe cunent is modulated by the probe voltage. This modulation is a combination of both amplitude modulation and phase modulation. By analyzing the amplitude and phase angle of the upper and lower sidebands (ω+ p, ω- p) that are derived by the modulation, the essential parameters of the RE plasma, such as the electron temperature, plasma density, time-averaged sheath voltage and amplitude of the plasma potential oscillation, can be estimated, similar to the method using pulse voltage.
- 社団法人応用物理学会の論文
- 2002-07-15
著者
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ITATANI Ryohei
Niihama National College of Technology
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DEGUCHI Mikio
Niihama National College of Technology
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Deguchi M
Niihama National Coll. Technol. Ehime Jpn
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