Abatement of CF4 Using Atmospheric Pressure discharge Plasma
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概要
- 論文の詳細を見る
- 2001-04-19
著者
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Toda Toshihiko
Youth Engineering Co. Ltd.
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ITATANI Ryohei
Niihama National College of Technology
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DEGUCHI Mikio
Niihama National College of Technology
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BAN Heitaro
THREE TECH Co., LTD.
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Ban Heitaro
Three Tech Co. Ltd.
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