Ultraprecision 5-Axis Control Machining of Fly-Eye Mirror in EUV Lithography

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概要

• 論文の詳細を見る

• The study deals with the manufacture of fly-eye mirrors for EUVL by means of ultraprecision 5-axis control milling. The mirrors consist of many small spherical mirror elements with many steps among them. In the present study, two new methods for manufacturing the mirrors using a single-crystal diamond tool are proposed. One method uses a sphere type tool with a circular arc cutting edge. Though the method is theoretically efficient, it is found that it is not practical due to the difficulty of manufacturing the tool accurately. The other one uses a cylinder type tool with a right-angled cutting edge. The tool enables the manufacturing of spherical surfaces with any radius and supports practical use because the efficiency of this method is independent of tool form accuracy. The fly-eye mirror was machined by the latter method to have an array of four spherical mirror elements with the required steps and without any burrs.

• 一般社団法人日本機械学会の論文
• 2004-09-15

著者

• Nomura Kazushi

  Nikon Corp.

• TAKINO Hideo

  Nikon Corporation

• HASHIMOTO Yoshinori

  Department of Quantum Engineering and Systems Science, The University of Tokyo

• Takeuchi Yoshimi

  Department Of Mechanical Engineering Graduate School Of Engineering Osaka University

• Takeuchi Yoshimi

  Department Of Computer-controlled Mechanical Systems Osaka University

• Takino Hideo

  Nikon Corp.

• Sawada Kiyoshi

  Fanuc Ltd.

• Hashimoto Yoshinori

  Department Of Mechanical And Control Engineering University Of Electro-communications

• Hashimoto Yoshinori

  Department Of Applied Science Kochi University

• KAWAI Tomohiko

  FANUC Ltd.

• Takeuchi Yoshimi

  Department Of 2nd Surg. Niigata University School Of Medicine

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