Smoothing of Diamond-Turned Copper Surfaces Using Ion Beams with Aid of Planarizing Film

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概要

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• We investigate ion beam etching that uses a planarizing film for smoothing copper surfaces with nm-order roughness. Copper surfaces were cut using a turning machine with a single-crystal diamond tool to prepare mirror surfaces as workpieces. Then, the surfaces were coated with photoresist, and etched using ion beams with an appropriate incidence angle. As a result, tool marks exhibited on the turned surfaces were removed, and the surfaces with a smoothness of nm order were further improved by the ion beam process.

• 2007-09-15

著者

• Nomura Kazushi

  Nikon Corp.

• Takino Hideo

  Nikon Corp.

• Frost Frank

  Leibniz Institute for Surface Modification, 04318 Leipzig, Germany

• Schindler Axel

  Leibniz Institute for Surface Modification, 04318 Leipzig, Germany

• Fechner Renate

  Leibniz Institute for Surface Modification, 04318 Leipzig, Germany

• Ohi Namiko

  Nikon Corporation, Sagamihara, Kanagawa 228-0828, Japan

• Nomura Kazushi

  Nikon Corporation, Sagamihara, Kanagawa 228-0828, Japan

• Takino Hideo

  Nikon Corporation, Sagamihara, Kanagawa 228-0828, Japan

関連論文

• Ion Beam Figuring (IBF) Solutions for High Performance Optics Surface Finishing from Meter to Millimeter Spatial Wavelength Range(Advances in non-traditional machining)
• Plasma Chemical Vaporization Machining (CVM) for Fabrication of Optics
• Contouring of polished single-crystal silicon plates by wire electrical discharge machining
• Ultraprecision 5-Axis Control Machining of Fly-Eye Mirror in EUV Lithography
• Smoothing of Diamond-Turned Copper Surfaces Using Ion Beams with Aid of Planarizing Film

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