Contouring of polished single-crystal silicon plates by wire electrical discharge machining
スポンサーリンク
概要
- 論文の詳細を見る
- 2007-10-01
著者
-
Nomura Kazushi
Nikon Corp.
-
Nomura Kazushi
Nikon Corporation
-
TAKINO Hideo
Nikon Corporation
-
Takino Hideo
Nikon Corp.
-
KUNIEDA Masanori
Tokyo Univ. of Agri. & Tech.
-
ICHINOHE Toshimitsu
Nikon Corporation
-
TANIMOTO Katsunori
Nikon Corporation
-
Kunieda Masanori
Tokyo University Of Agriculture & Technology
-
Kunieda Masanori
Dep. Of Mechanical Systems Engineering Tokyo Univ. Of Agriculture And Technol. 2-24-16 Naka-cho Koga
関連論文
- Plasma Chemical Vaporization Machining (CVM) for Fabrication of Optics
- Improvement of acuracy in potential method for detecting EDM spark locations
- Fundamental Study on Quantitative Estimation of Discharge Delay Time in EDM
- Contouring of polished single-crystal silicon plates by wire electrical discharge machining
- Influence of Electrode Surface Profile on Discharge Delay Time in Electrical Discharge Machining
- Feasibility of 3-D Surface Machining by Dry EDM
- Ultraprecision 5-Axis Control Machining of Fly-Eye Mirror in EUV Lithography
- Electrical Discharge Machining Using Electrically Conductive CVD Diamond as an Electrode (第180回電気加工研究会)
- Smoothing of Diamond-Turned Copper Surfaces Using Ion Beams with Aid of Planarizing Film
- Simultaneous Processing Method for Micro-Rods and Holes Using EDM
- Simulation of Electrode Surface Temperature in Die-Sinking EDM Process
- Research on anisotropy in electrical discharge machining of monocrystalline silicon
- Difference in limit of miniaturization between monocrystalline and polycrystalline aluminum in EDM
- Study on Influence of Inter-electrode Atmosphere on Carbon Adhesion and Removal Amount
- Relation between Debris Concentration and Discharge Gap Width in EDM Process
- Relation Between Debris Concentration and Discharge Gap Lenght in EDM Process
- Study on the Dry WEDMed Surface Layer
- Understanding Dry-WEDM Phenomena through Periodic Oscillation of Discharge Gap