Microstructural and Electrical Properties of Ba_xSr_1-xTiO_3 Thin Films on Various Electrodes

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概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 2000-04-15

著者

• Kim O

  Hanyang Univ.‐ansan Kyunggi‐do Kor

• AN Ilsin

  Physics Department, Hanyang University

• HONG Seokmin

  Physics Department, Hanyang University

• BAK Heungjin

  Physics Department, Hanyang University

• KIM Ok

  Physics Department, Hanyang University

• An Ilsin

  Physics Department Hanyang University

• Bak Heungjin

  Physics Department Hanyang University

• Hong Seokmin

  Physics Department Hanyang University

• Kim Ok

  Physics Department Hanyang University

• Bak Heungjim

  Physics Department, Hanyang University

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• Microstructural and Electrical Properties of Ba_xSr_1-xTiO_3 Thin Films on Various Electrodes
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• Resist Pattern Collapse with Top Rounding Resist Profile
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