Resist Pattern Collapse with Top Rounding Resist Profile

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概要

• 論文の詳細を見る
• Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
• 2003-06-30

著者

• Yoo Ji-yong

  Physics Department Hanyang University

• LEE Hyung-Joo

  Physics Department, Hanyang University

• PARK Jun-teak

  Physics Department, Hanyang University

• AN Ilsin

  Physics Department, Hanyang University

• OH Hye-Keur

  Physics Department, Hanyang University

• Lee Hyung-joo

  Physics Department Hanyang University

関連論文

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• Photoresist Exposure Parameter Extraction from Refractive Index Change during Exposure
• Resist Pattern Collapse with Top Rounding Resist Profile

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