干渉フェムト秒レーザーを用いた薄膜加工によるナノ構造物の創製(S55-2 レーザ加工(2),S55 レーザ加工)

概要

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Nanomaterials such as nanobump, nanomesh, nanobelt were generated from thin film processed by interfering femtosecond (fs) laser. To correlate fs laser beams, a demagnification system with a transmission grating was applied. With four interfering fs laser beams, a nanohole array was generated, and a nanomesh was generated by scratching the film. Grating was generated with two beam, and nanobelts were generated from that by scratching. Moreover, a nanobump array was generated with lower fs laser fluence. Conical, ellipsoidal and linear nanobumps were generated with four, three and two interfering fs laser beams, respectively. As an application of the conical nanobump array, filed emission experiment was demonstrated.
社団法人日本機械学会の論文
2004-09-04