Enhanced Interdiffusion in the Al-Si System during Ar Ion Bombardment
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1979-09-05
著者
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Inoue Kaoru
Semiconductor Research Center, Matsushita Electric Industrial Co., Ltd.
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Hirao Takashi
Semiconductor Laboratory Matsushita Electric Industrial Co. Ltd.
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Kusao Kenji
Materials Research Lab. Matsushita Electric Industrial Co. Ltd.
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Kusao Kenji
Materials Research Laboratory Matushita Electric Industrial Co. Ltd.
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NAKAJIMA Masato
Materials Research Laboratory, Matushita Electric Industrial Co., LTD.
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TAKAYANAGI Shigetoshi
Semiconductor Research Laboratory, Matushita Electric Industrial Co., LTD.
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Inoue Kaoru
Semiconductor Laboratory Matsushita Electric Industrial Co. Ltd.
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Nakajima Masato
Materials Research Laboratory Matushita Electric Industrial Co. Ltd.
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Takayanagi Shigetoshi
Semiconductor Laboratory Matsushita Electric Industrial Co. Ltd.
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