Authors' Reply to Comment on "Anomalous Ag Surface Diffusion in Amorphous Se-Ge/Ag Inorganic Resist"
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1982-05-20
著者
-
Zembutsu Sakae
Ibaraki Electrical Communication Laboratory Nippon Telegraph And Telephone Public Corporation
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Funakoshi Nobuhiro
Ibaraki Electrical Communication Laboratory Nippon Telegraph And Telephone Public Corporation
関連論文
- Pattern Size Dependence of Sensitivity of Inorganic SeGe/Ag Resist
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- The Origin of the Composition Variation of Amorphous Gd-Co Films Prepared by rf-Bias-Sputtering
- Thermal Behavior and Crystallization Kinetics of Amorphous PdSi Alloys
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- The Compositional Dependence of the Crystallization Temperature in Amorphous Co-Si-B Alloys
- Composition Control of dc-Sputtered Amorphous Gd-Co Magnetic Thin Films
- Authors' Reply to Comment on "Anomalous Ag Surface Diffusion in Amorphous Se-Ge/Ag Inorganic Resist"
- The Crystallization Kinetics of Amorphous PdAgSi Alloys
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