Morphological Change and Inhibitory Effect on Ag Surface by ArF Excimer Laser Irradiation
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概要
- 論文の詳細を見る
We have carried out studies of morphologies of silver surfaces irradiated by ArF eximer laser irradiation in vacuum(10^-3 Pa). Three different morphologies were observed corresponding to various laser fluences. In the high irradiation region(above 600 mJ/cm^2), wave-like ridges and droplets were observed. In the intermediate region(about 200 mJ/cm^2), ripples were observed. In the low irradiation region(below 70 mJ/cm^2), changes were not observed using an optical microscope, but were with an atomic force microscope(AFM). We have clarified that laser irradiation in the fluence range below 70 mJ/cm^2 yields a silver surface with excellent corrosion-resistant properties.
- 社団法人応用物理学会の論文
- 2000-03-15
著者
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Tabata H
Department Of Bioengineering School Of Engineering University Of Tokyo
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Tabata Hitoshi
Institute Of Scientific And Industrial Research Osaka University
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Kawai Tomoji
Institute For Scientific And Industrial Research Osaka University
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TABUCHI Satomi
Mint Bureau, Ministry of Finance
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Tabuchi Satomi
Mint Bureau Ministry Of Finance
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