New and Simple MOCVD Technique Using Completely Gaseous MO-Sources Especially Useful for Growing Zn-Chalcogenide Films

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概要

• 論文の詳細を見る

• A Simple and inexpensive MOCVD technique using completely gaseous MO-sources especially useful for growing Zn-chalcogenide and -oxide films is proposed. It is shown that the flow rate of MO-source material can be controlled more accurately and simply by this technique than in a conventional MOCVD technique using a bubbling-cylinder for MO-source. Its application for growing ZnS and ZnSe films is also shown. High-quality and low-resistivity ZnSe films are grown on GaAs substrates without intentional doping using this technique and show a strong blue near-band-edge photoluminescent peak.

• 社団法人応用物理学会の論文
• 1984-06-20

著者

• TANAKA Keiji

  Department of Applied Chemistry, Kyushu University

• Tanaka Keiji

  Department Of Cardiology Tokyo Women's Medical University

• YOSHIKAWA Akihiko

  Department of Electronics and Mechanical Engineering, Chiba University

• Yoshikawa Akihiko

  Department Of Electrical And Electronics Engineering Chiba University

• YAMAGA Shigeki

  Department of Electrical and Electronics Engineering, Chiba University

• Yamaga Shigeki

  Department Of Electrical And Electronics Engineering Chiba University

• Yamaga S

  Department Of Electrical And Electronics Engineering Faculty Of Engineering Chiba University

• Tanaka Keiji

  Department Of Applied Chemistry Kyushu University

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