Effects of |H_2Se|/|DMZn| Molar Ratio on Epitaxial ZnSe Films Grown by Low-Pressure MOCVD

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概要

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• Effects of the |H_2Se|/|DMZn| molar ratio on the electrical and optical properties of nominally undoped ZnSe films grown on (100) GaAs substrates by low-pressure MOCVD have been studied. It was found that the carrier concentration in the films decreases with the molar ratio, while the luminescence intensity ratio between the NBE emission and that from deep centers increases. Furthermore, the distance between an inlet nozzle for DMZn and the substrate was found to give qualitatively the same effects to the properties of ZnSe films as those by the molar ratio.

• 社団法人応用物理学会の論文
• 1984-10-20

著者

• TANAKA Keiji

  Department of Applied Chemistry, Kyushu University

• Tanaka Keiji

  Department Of Cardiology Tokyo Women's Medical University

• YOSHIKAWA Akihiko

  Department of Electronics and Mechanical Engineering, Chiba University

• Yoshikawa Akihiko

  Department Of Electrical And Electronics Engineering Chiba University

• YAMAGA Shigeki

  Department of Electrical and Electronics Engineering, Chiba University

• KASAI Haruo

  Department of Electrical and Electronics Engineering, Chiba University

• Yamaga Shigeki

  Department Of Electrical And Electronics Engineering Chiba University

• Tanaka Keiji

  Department Of Applied Chemistry Kyushu University

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