Concentration Effect of Pb in Sputter-Deposited Bi-Sr-Ca-Cu-O Superconducting Thin Films

概要

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Superconducting thin films of the Pb-doped Bi-Sr-Ca-Cu-O system have been prepared on MgO substrates by dc magnetron sputtering using a single sintered target. After deposition at 400℃ and post-annealing at 850℃ for 3 h in air, we have succeeded in obtaining highly c-axis oriented thin films which have shown zero resistivity at 115 K. In order to examine the effect of Pb concentration, composition analysis was performed by electron probe X-ray microanalysis. As a result, the composition of the as-sputtered films deposited below 400℃ was almost the same as that of the targets, except for a slight decrease in the Bi concentration. Further, we found that the Pb-content of the film decreased quickly only during the early stage of annealing at 850℃ and quite slowly thereafter.
社団法人応用物理学会の論文
1989-05-20