As-Grown Crystallized Thin Films on Bi(Pb)-Sr-Ca-Cu-O by Single-Target Magnetron Sputtering

概要

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As-grown crystallized superconducting thin films of Bi(Pb)-Sr-Ca-Cu-O have been prepared on MgO (100) at 620-720℃ by dc magnetron sputtering using a single target. The targets used were Bi_xPb_1Sr_2Ca_<2.2>Cu_3O_y (x=2.0 and 2.5) in nominal composition. The obtained films had a smooth surface and exhibited a high degree of c-axis orientation perpendicular to the substrate. The c-axis lattice constant of the films was controlled to the values of about 24, 31, 37 and 43 Å by changing the substrate temperature, respectively. As a result, the superconducting properties of the films were strongly affected by the substrate temperatures during film growth. These results also showed that the films with different c-axis lattice constants (i.e., different numbers of CuO_2 planes) were easily prepared by a simple single-target sputtering.
社団法人応用物理学会の論文
1990-04-20