Single Target Sputtering of As-Grown Superconducting Bi(-Pb)-Sr-Ca-Cu-O Thin Films on MgO(100)

概要

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As-grown superconducting thin films of Bi(-Pb)-Sr-Ca-Cu-O have been prepared on MgO (100) at 620-720℃ by dc magnetron sputtering using a single target. The targets used were Pb-free Bi_3Sr_2Ca_<2.2>Cu_3O_x and Pb-doped Bi_3Pb_2Sr_2Ca_<2.2>Cu_3O_x in nominal compositions. The as-grown process with no annealing yields c-axis oriented superconducting thin films with zero resistivity above 70 K. The superconducting properties of the thin films were affected by the substrate temperatures during film growth. The c-axis lattice constant of the films was also controlled to the value of 24-37 Å by changing the substrate temperature. The best film showed zero resistivity at 76 K and a superconducting 37 Å phase. The critical current density was measured at 4.2K with J_c=2×10^6A/cm^2.
社団法人応用物理学会の論文
1990-06-20