Preparation of Superconducting Niobium Nitride Films by Molecular Beam Epitaxy Method
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概要
- 論文の詳細を見る
Preparation of superconducting niobium nitride (NbN) films was attempted by two kinds of electron-beam deposition methods. One is a molecular beam epitaxy (MBE) method using a radical beam source (RBS). The other is a reactive deposition method assisted by radio frequency plasma. The films grown by the RBS-MBE method showed a clear superconducting transition. The observed maximum superconducting transition temperature (T_c) was 9.5 K.
- 社団法人応用物理学会の論文
- 1991-12-15
著者
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SOHMA Mitsugu
National Institute of Advance Industrial Science and Technology (AIST)
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Sohma Mitsugu
National Chemical Laboratory For Industry
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KAWAGUCHI Kenji
National Institute of Materials and Chamical Research
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Kawaguchi Kenji
National Chemical Laboratory For Industry
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